Details

Title

Applications of the LTCC ceramics in microplasma systems

Journal title

Metrology and Measurement Systems

Yearbook

2019

Volume

vol. 26

Issue

No 4

Authors

Keywords

microplasma ; Low-Temperature Co-fired Ceramics ; microsystems

Divisions of PAS

Nauki Techniczne

Coverage

713-724

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2019.12.28

Type

Article

Identifier

DOI: 10.24425/mms.2019.130564

Source

Metrology and Measurement Systems; 2019; vol. 26; No 4; 713-724

Open Access Policy

Metrology and Measurement Systems is an open access journal with all content available with no charge in full text version.


The journal content is available under the license CC BY-NC-ND 4.0. https://creativecommons.org/licenses/by-nc-nd/4.0/
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