Details

Title

Laser Reflectance Interferometry System with a 405 Nm Laser Diode for in Situ Measurements of CVD Diamond Thickness

Journal title

Metrology and Measurement Systems

Yearbook

2013

Issue

No 4

Authors

Keywords

interferometry ; thin films ; CVD ; diamond ; in situ measurements

Divisions of PAS

Nauki Techniczne

Coverage

543-554

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2013

Type

Artykuły / Articles

Identifier

DOI: 10.2478/mms-2013-0046 ; ISSN 2080-9050, e-ISSN 2300-1941

Source

Metrology and Measurement Systems; 2013; No 4; 543-554

Open Access Policy

Metrology and Measurement Systems is an open access journal with all content available with no charge in full text version.


The journal content is available under the license CC BY-NC-ND 4.0. https://creativecommons.org/licenses/by-nc-nd/4.0/
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