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Abstract

In high-performance optical systems, small disturbances can be sufficient to put the projected image out of focus. Little stochastic excitations, for example, are a huge problem in those extremely precise opto-mechanical systems. To avoid this problem or at least to reduce it, several possibilities are thinkable. One of these possibilities is the modification of the dynamical behavior. In this method the redistribution of masses and stiffnesses is utilized to decrease the aberrations caused by dynamical excitations. Here, a multidisciplinary optimization process is required for which the basics of coupling dynamical and optical simulation methods will be introduced. The optimization is based on a method for efficiently coupling the two types of simulations. In a concluding example, the rigid body dynamics of a lithography objective is optimized with respect to its dynamical-optical behavior.
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