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Abstract

A novel laser diode based length measuring interferometer for scientific and industrial metrology is presented. Wavelength the stabilization system applied in the interferometer is based on the optical wedge interferometer. Main components of the interferometer such as: laser diode stabilization assembly, photodetection system, measuring software, air parameters compensator and base optical assemblies are described. Metrological properties of the device such as resolution, measuring range, repeatability and accuracy are characterized.
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Abstract

In order to calibrate the stripe precision of a leveling rod, an automatic laser interferometer and a vision measurement system were designed by Xi’an University of Technology in China. The rod was driven by a closed-loop control and the data were collected at the stop state to ensure precision. The laser interferometer provided not only the long distance data but also a position feedback signal in the automatic control loop. CCD camera and a vision measurement method were used to inspect the stripe edge position and defect. A pixel-equivalent self-calibration method was designed to improve precision. ROI (regions of interest) method and an outline tracing method were designed to quickly extract multiple stripe edges. A combination of the image data with the interferometer data reduces control difficulty and ensures the measurement accuracy. The vision measurement method reached sub-pixel precision and the defective edges were reported. The system can automatically calibrate a stripe leveling rod with a high degree of efficiency and precision.
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