Results of scientific researches show the trend of active using nitrides and borides of transition metals and their combination in developing protective materials. While single elements nitrides have been well studied, their multilayer modifications and combinations require more detailed study. Physical-mechanical properties and structural-phase state of multilayer coating according to the deposition conditions is an important task for the study. It will be the analysis of physical-mechanical and electrical properties of coatings based on refractory metals nitrides, their structure and phase composition and surface morphology depending on the parameters of condensation. It was established the structure and behavior of nano scale coatings based on refractory metals nitrides (Ti, Zr) depending on the size of nano grains, texture, stress occurring in coatings.