Details

Title

Applications of the LTCC ceramics in microplasma systems

Journal title

Metrology and Measurement Systems

Yearbook

2019

Volume

vol. 26

Numer

No 4

Authors

Keywords

microplasma ; Low-Temperature Co-fired Ceramics ; microsystems

Divisions of PAS

Nauki Techniczne

Coverage

713-724

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2019.12.28

Type

Article

Identifier

ISSN 0860-8229

DOI

10.24425/mms.2019.130564

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