Details

Title

Micro and nano structurization of semiconductor surface

Journal title

Bulletin of the Polish Academy of Sciences: Technical Sciences

Yearbook

2005

Volume

vol. 53

Numer

No 4

Authors

Keywords

silicon tips ; SiC tips ; transfer mold technique ; field emission ; FEA

Divisions of PAS

Nauki Techniczne

Coverage

433-440

Date

2005

Type

Artykuły / Articles
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