@article{Orłowska_Karolina_Wide-Band_2014, author={Orłowska, Karolina and Świątkowski, Michał and Kunicki, Piotr and Słupski, Piotr and Sankowska, Anna and Gotszalk, Teodor}, howpublished={online}, year={2014}, abstract={
In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-band preamplifier are presented.
}, title={Wide-Band Optical Fibre System for Investigation of MEMS and NEMS Deflection}, type={Artykuły / Articles}, number={No 3}, journal={Metrology and Measurement Systems}, pages={381-388}, publisher={Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation}, doi={10.2478/mms-2014-0032}, keywords={fibre optic sensors, amplitude detection, intensity detection, MEMS/NEMS deflection measurement}, }